【中文文摘】微电子机械系统(MEMS)是一项21世纪可以广泛应用的新兴技术。硅微机械加工工艺是近年来随着集成电路工艺发展起来的MEMS主流技术。介绍了MEMS的特点、国内外MEMS的发展现状,讨论了MEMS的三种加工方法,着重探讨了硅微机械加工中常用的腐蚀、键合、光刻、氧化、扩散、溅射等工艺。
【英文文摘】Microelectronics mechanical system (MEMS) is a new technology widely used in 21th century.Silicon Micromachining technique has developed into the main MEMS producing technology with the development of integrate circuit technique.The characteristic and status of MEMS are introduced,three machining methods are described in detail,and the techniques are emphasised such as etching,bonding,photoetching,oxidizing,diffusing,sputtering and so on
