THE INVESTIGATION OF THE INFLUENCE OF THE UNIT CONSTRUCTION AND THE PARAMETERS OF THE PROCESS OF THE MAGHETRON SPRAYING AND SPRAYING WITH ION BEAM ON FILMS STRUCTURE

Abstract

The purpose of the work: the performance of the complex of investigations, directed to the improvement of the vacuum units. For the first time, the methods of constructing of spraying systems, combining in one technological volume and operating simultaneously the magnetron and ion-beam sources of the sprayed targets substance and ensuring the growth of the films with insignificant disorientation of grains on the substructures, made from the amorphic and polycrystalline materials, and alloying of the films in the course of its drowing have been developedAvailable from VNTIC / VNTIC - Scientific & Technical Information Centre of RussiaSIGLERURussian Federatio