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Depot plasma dans une vapeur d'organometallique de films minces d'oxydes d'aluminium
Authors
Ali-Asghar Talebian
Publication date
1 January 1986
Publisher
Abstract
SIGLECNRS T Bordereau / INIST-CNRS - Institut de l'Information Scientifique et TechniqueFRFranc
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Last time updated on 14/06/2016