Highly efficient industrial-size silicon solar cells based on innovative OECO technology Paper

Abstract

The obliquely evaporated contact (OECO) solar cell structure recently developed at ISFH allows to reach efficiencies of 20% and above by applying an industrially feasible manufacturing process. In this paper, the key technologies for the fabrication of OECO-type solar cells: (i) mechanical grinding for surface structuring, (ii) oblique vacuum evaporation for metallization, (iii) remote plasma-enhanced chemical vapour deposition (RPECVD) of silicon nitride (SiNx) for surface passivation and (iv) conductive adhesive technology for cell interconnection are discussed in detail. Furthermore, the latest results of industrial-size OECO solar cells are presented.Available from: http://www.isfh.de/institut/publika/muenchen.htm / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekSIGLEDEGerman