The use of injection moulding for micro technology products is increasing steadily due to its economical and technical importance. A lot of products for medical, telecommunication or biotechnology applications require high precision combined with low production costs. LIGA technology allows the production of moulds for parts with sub millimetre precision. Micro injection moulding combines high automation and the processing of engineering polymers. Within this research the process of filling micro structured parts is investigated. Micro structured parts are parts with regular injection moulding size containing sections on the part which are structured in the sub-millimetre range. Further on software tools for the simulation of the filling process are used and investigated to evaluate the usability of such tools for micro injection moulding. This results lead to the definition of new specifications for simulation tools. (orig.)SIGLEAvailable from TIB Hannover: RA 5476(19) / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekDEGerman