Plasmatechnische Untersuchung zur Realisierung einer inkohaerenten Hochleistungs-UV-Strahlungsquelle Teilprojekt C: Verfahrenstechnische Untersuchungen zur Realisierung von UV-Hochleistungsstrahlern. Abschlussbericht 1991-1993

Abstract

New powerful UV sources can have a drastic impact on the growing UV-market. Within this subproject C various engineering solutions towards the realization of high-power radiation sources (excimer-UV-lamps) were investigated. Starting from the state of the art (section A, B) new concepts for excimer-UV-equipment (e.g. large area or internal radiators) which could be transferred directly to industrial plants (sections C - G) were developed. In addition, emphasis was put on the application of these excimer UV lamps in areas, such as surface metallization, modification of polymer surfaces, and UV-induced decomposition of hazardous materials. Also, a brief discussion regarding the evaluation and marketability of the excimer-UV technology was included. (orig.)SIGLEAvailable from TIB Hannover: F94B1445+a / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekBundesministerium fuer Forschung und Technologie (BMFT), Bonn (Germany)DEGerman

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