Methoden- und Werkzeugentwicklung fuer den Microsystementwurf. Teilprojekt 2: Werkzeuge und Schnittstellen. Arbeitspaket 2.1: Beschreibung und Modellierung physikalischer Systeme Schlussbericht

Abstract

The goal of the working area 2.1 consisted of the modeling capacity pressure sensors, the implementation of these models in different simulation tools and the comparison of the tools referring to their suitability. Different methods of implementation have been analysed: ABM-modeling in PSPICE/ELDO, modeling in C-Code, FAS-modeling in ELDO, HDL-A-modeling in ELDO, C-Code modeling in KOSIM, FEM-modeling in ANSYS. By means of FEM-calculations the abstract geometries of sensors were made real. Furthermore, the results wer proved by experiments. The result of the experiments differed only some per cents from the simulation results. Final result: The best and easiest way to describe the sensor models has been found using HDL-A in ELDO also achieving good results compared with FEM-calculation. (orig.)SIGLEAvailable from TIB Hannover: DtF QN1(57,47) / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekBundesministerium fuer Bildung, Wissenschaft, Forschung und Technologie, Bonn (Germany)DEGerman