Grundlagen und Anwendungen mehrelementiger pyroelektrischer Sensorsysteme (GAMPYS). Teilvorhaben: Sensortechnologien und Messtechnik pyroelektrischer Mehrelementsensoren Abschlussbericht

Abstract

Pyroelectric single-element and multielement infrared sensors for application in pyrometry, gas analysis and thermography have been developed and tested using lithium tantalate LiTaO_3 as the pyroelectricum. LiTaO_3 wafers were prepared and their pyroelectric and dielectric properties were characterized for different chip layouts. Chip thickness of <5 #mu#m was achieved by ion beam etching. INDAB (induced absorption) layers obtained by on-chip layering of LiTaO_3 wafers and chips were structurated by the lift-off technique. A high-sensitivity single-element sensor, 4-channel and 2-channel multispectral sensors and a 128-element-line sensor were constructed and the sensor characteristics of these prototypes were measured as a function of ambient temperature and chopper frequency. (WEN)SIGLEAvailable from TIB Hannover: F97B596 / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekBundesministerium fuer Bildung, Wissenschaft, Forschung und Technologie, Bonn (Germany)DEGerman