The present volume summarizes the contributions to the Workshop 'MST Service Centres' at the conference 'MICRO SYSTEM Technologies 94' (Berlin). The following publications are presented: Micro System Technologies - a Technology suitable for small and medium enterprises?; Technology and Design of High Temperature Stable Circuits on GaAs; Failure recognition and process diagnosis by means of fuzzy classification; Integrated optical circuits for velocity measurements; Micro mechanical scanning systems; Silicon sensor for mass flow measurement; Thin film components for micro-chemical application; Humidity-resistant metal-polymer joints by silicoating; Reliability evaluation of MST components; Flip-chip technology for advanced low cost multichip application; Fabrication of micromechanical components in silicon; Displacement amplifiers in solid-state actuators in fluid power engineering; Applications of new actuators; Fieldbus automation components; Testing of interconnected systems; Signal processing with integrated circuits in small volume production. (WEN)Available from TIB Hannover: RO 3532(17) / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekSIGLEDEGerman