Dienstleister in der Mikrosystemtechnik Tagungsbericht zum Workshop ''MST Service Centres''

Abstract

The present volume summarizes the contributions to the Workshop 'MST Service Centres' at the conference 'MICRO SYSTEM Technologies 94' (Berlin). The following publications are presented: Micro System Technologies - a Technology suitable for small and medium enterprises?; Technology and Design of High Temperature Stable Circuits on GaAs; Failure recognition and process diagnosis by means of fuzzy classification; Integrated optical circuits for velocity measurements; Micro mechanical scanning systems; Silicon sensor for mass flow measurement; Thin film components for micro-chemical application; Humidity-resistant metal-polymer joints by silicoating; Reliability evaluation of MST components; Flip-chip technology for advanced low cost multichip application; Fabrication of micromechanical components in silicon; Displacement amplifiers in solid-state actuators in fluid power engineering; Applications of new actuators; Fieldbus automation components; Testing of interconnected systems; Signal processing with integrated circuits in small volume production. (WEN)Available from TIB Hannover: RO 3532(17) / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekSIGLEDEGerman