Untersuchung der Eigenschaften einer Argon-Glimmentladung mit Titankathode mittels Langmuir-Sonde und Laser induzierter Fluoreszenz

Abstract

In this work an abnormal Argon glow discharge with Titanium cathode has been investigated. The results presented are the measurements and calculations concerning the electron beam plasma in the negative glow. Two diagnostics have been employed to determine the plasma parameters. A Langmuir probe has been used in the negative glow to measure the spatial distributions of the electron density, temperature and the plasma potential. Two electron groups were found, slow electrons with a temperature of 0.3 eV and density of #propor to#10"1"1 cm"-"3, and fast electrons with #propor to#3.0 eV and #propor to#10"7 cm"-"3. Under all operational conditions the plasma potential was almost constant within the negative glow and about 1.5 V positive with respect to the anode voltage. The electric field has been calculated from the potential profile. It is shown that, within the error of measurement, this electric field is equal to the ambipolar electric field, which has been calculated from the electron density and temperature profiles. (orig.)SIGLEAvailable from TIB Hannover: RA 831(2655) / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekDEGerman