Fabrication et propriétés optiques des cristaux photoniques mono et bidimensionnel basés sur silicium

Abstract

In this work, we have fabricated and studied photonic crystal slabs in waveguide configuration made by SOI. There are realised by standard fabrication processes and new ones. We have in particular studied optical dispersion of defect modes in a one and two-dimensional array. This thesis is presented in three parts. In the first one optical properties of photonic crystals are presented; in the second one fabrication methods are explained. In particular, we described the conventional method and innovative one developed during this work. By this techniques we fabricated large surface photonic crystal at low cost. In the last part, the optical results are presented. In particular, optical characterization of W1.5 defect in membrane is presented.PARIS-BIUSJ-Thèses (751052125) / SudocPARIS-BIUSJ-Physique recherche (751052113) / SudocSudocFranceItalyFRI