Conception de capacités commutées MEMS RF miniatures et application à la reconfiguration rapide de déphaseurs

Abstract

This work presents design of fast miniature RF MEMS switched capacitors and their application to Distributed MEMS Transmission Line phase shifters. The goal is to increase the switching speed since it is currently rarely under the microsecond. Thus, an original geometry has been studied and geometrical dimensions of the micromechanical beam have been optimized. Mechanical and RF measurements have also been done to validate theoretical results and to characterize the fabricated components. These miniature RF MEMS switched capacitors have been implemented on distributed lines to achieve fast phase shifting operations based on micromechanical systems. Switching time, return loss and insertion loss measurements are also presented.LIMOGES-BU Sciences (870852109) / SudocSudocFranceF