The ZnO films were prepared by reactive rf-magnetron sputtering on silicon and sapphire substrates. For Cu-doping of the ZnO films, the close space sublimation method (CSS) was used at atmospheric pressure in air. After CSS processing, the ZnO and ZnO-Cu films were annealed in a wet media. The reference ZnO-Cu films, obtained from ZnO-Cu target by electron-beam evaporation (EBE) were treated at the same conditions. The microstructure and optical properties of the samples were compared and studied by atomic force microscopy (AFM), X-ray diffraction (XRD), photoluminescence (PL) and cathodoluminescence (CL) spectra. XRD results indicated that all the ZnO films have a polycrystalline hexagonal structure. The surface and crystal quality of ZnO thin film was improved when doped with Cu. The shape of the spectrum depends on the method of doping. Spectrum of the reference ZnO-Cu films has green band only. Spectrum of ZnO-Cu films consists of three emission bands at doping by CSS. The first band is in a blue region with a maximum at 465 nm. The second and third bands are in the green and orange regions with maximum at 520 and 580-600 nm, respectively. The green band is the most intensive. As a consequence, the emission looks like white light. Origin of observed emission bands is discussed
