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Сетевая система контроля технологического процесса выращивания полупроводниковых кристаллов и тонких пленок
Authors
A Abendroth
A Halenius
+138 more
A Hill
A Jons
A Kenneson
A Kienast
A Kodan
AD Hislop
AD Kwong
AD Lipinska
AJ Davison
AJ Davison
AJ Eisfeld
Andrew J. Davison
B Galocha
B Glaunsinger
B Park
B Sadasivan
BB Finlay
Bryan D. Griffin
C Liang
CJ Powers
CL Perria
D Alzhanova
D Beinert
D Horst
D Horst
D Koppers-Lalic
D Koppers-Lalic
D Nachmani
Daniëlle Horst
DJ McGeoch
DJ McGeoch
DR Peaper
E Procko
EA Armandola
EA Reits
EJ Wiertz
EJ Wiertz
Emmanuel J. H. J. Wiertz
EO Long
EW Hewitt
F Momburg
F Seyffer
GW Wilkinson
H de la Salle
H de la Salle
H de la Salle
H Hengel
H Ziegler
HT Moins-Teisserenc
IA York
J Geng
J Kim
J Koch
J Koch
J Lin
J Rudolph
J Yuan
J Zuo
J Zuo
J Zuo
JA Campbell
JE Bigger
JH Cox
JM Boname
JM Middeldorp
JO Koopmann
JS Burgos
K Ahn
K Ahn
K Fruh
K Goldsmith
K Grauwet
Kasturi Haldar
L Coscoy
L Lybarger
L Neumann
L Saveanu
LL Quinn
M Byun
M Byun
M Chen
M Hohl
M Nijenhuis
M Raghavan
M Rowe
M Vasireddi
MA Epstein
Maaike E. Ressing
Marieke C. Verweij
MC Verweij
MC Verweij
MC Verweij
MC Verweij
ME Ressing
MF Princiotta
MJ Androlewicz
ML Fenwick
N Grossmann
NL Glosson
NL Glosson
NP Croft
NT Pande
P Jugovic
PA Wearsch
PA Wearsch
PE Kilgore
PE Lapinski
PG Stevenson
PJ Lehner
PJ Lehner
PJ Lehner
PM van Endert
PM van Endert
PU Mayerhofer
R Tomazin
R Tomazin
RD Luteijn
RJ Dawson
RM Leonhardt
Rutger D. Luteijn
S Hulpke
S Ishido
SA Staras
SF Elena
SG Hansen
SX Wu
T Spies
T Spies
TN Schumacher
TR Jones
U Reusch
V Corradi
V Srinivasan
VG Lacaille
WD Rawlinson
WHt McCoy
X Wang
Y Chang
Publication date
1 January 2005
Publisher
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
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Abstract
Экспериментальное моделирование аппаратно-программного обеспечения показало достаточную надежность работы системы и значительное уменьшение трудоемкости контроля и управления параметрами технологического процесса
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