Improvements are proposed in the application of the Digital Image Correlation method, a technique that compares digital images of a specimen surface before and after deformation to deduce its sureface (2-D) displacement field and strains. These refinements, tested on translations and rigid body rotations were significant with regard to the computer efficiency and covergence properties of the method. In addition, the formulation of the algorithm was extended so as to compute the three-dimensional surface displacement field from Scanning Tunneling Microscope tomographies of a deforming specimen. The reolsution of this new displacement measuring method at the namometer scale was assessed on translation and uniaxial tensile tests and was found to be 4.8 nm for in-plane displacement components and 1.5 nm for the out-of-plane one spanning a 10 x 10 μm area
