Introductory Guide to Nanometrology

Abstract

This Guide introduces the reader to the science of measurements at the nanoscale, that is nanometrology. It is aimed at researchers in the nanotechnology area, for whom the metrology aspect is new, and at metrologists, interested in knowing about the specifics of metrology at the nanoscale. The Guide does not give an exhaustive review of the field. Rather it is intended to increase the general awareness of nanometrology, and its basic challenges. In a first section, three main questions are addressed: 1. What is (nano)metrology? 2. Why is nanometrology important? 3. What are the main challenges for nanometrology? The Guide continues with a section on the meaning of a number of generic metrology concepts. In the third section, the Guide illustrates some of the identified nanometrological challenges with practical examples and case studies from three different application areas (thin films, surface structures and nanoparticles). A final subsection is devoted to the emerging issue of metrology for nanobiotechnologyJRC.DG.D.2-Reference material