A new approach to imaging systems incorporating chemical amplification: Synthesis and preliminary evaluation of novel resists based on tertiary copolycarbonates: J.Imaging Sc.

Authors
Publication date
Publisher

Abstract

NRC publication: Ye

    Similar works

    Full text

    thumbnail-image

    Available Versions

    NRC Publications Archive

    redirect
    oaioai:cisti-icist.nrc-cnrc.ca:ci...
    Last time updated on 08/06/2016