Nanolithography for metallic quasi crystals for nanobio applications

Abstract

There is currently an urgent need to develop micro and nanotechnique for the fabrications of quasi periodic crystals in a plane for the study and applications of novel optical properties when light propagating in or through such a photonic structures with fold symmetries (10 fold symmetry in this work). It has been clear that quasi periodical crystals in dielectrics with various fold symmetries also exhibits complete photonic band gap (PBG) property as periodical photonic crystals do. However, the novel physical properties related to the interactions of electromagnetic waves with metallic holes arrays in quasi periodical order (metallic quasi crystals) is being discovered both theoretically and experimentally, which demands technical development for the construction of theoretically designed structures. [1] In this work, we report a nanofabrication technique recently developed for the replication of quasi crystal in 100 nm Al on a slab (quartz wafer in this work) by electron beam lithography using chemically amplified resist, UVN-30. A wealth of novel photonic behaviours of lights vertically incident through the q-crystal were observed