Sub-micron period relief grating structures inscribed on Erbium doped Ta₂O₅ waveguides using 213 nm, 150 ps laser radiation

Abstract

Tantalum Pentoxide (Ta2O5) films exhibit high refractive index (2.1 @ 1550 nm), transparency between 300 nm and 2000 nm wavelengths, compatibility with silicon processing techniques and high photosensitivity [1], making them ideal for realising compact multifunctional planar lightwave circuits (PLCs)