During the unloading segment of nanoindentation, time dependent displacement (TDD) accompanies elastic deformation. Consequently the modulus calculated by the Oliver-Pharr scheme can be overestimated. In this paper we present evidences for the influence of the measured modulus by TDD. A modification method is also presented to correct for the effects of TDD by extrapolating the TDD law in the holding process to the beginning of the unloading process. Using this method, the appropriate holding time and unloading rate can be estimated for nanoindentation test to minimise the effects of TDD. The elastic moduli of three materials computed by the modification method are compared with the results without considering the TDD effects.published_or_final_versio
