We report total electron scattering cross sections (TCS) for SF6, SF5 CF3, and CF3I, molecules of interest to the plasma industry over the energy range from threshold to 2000 eV. We also report the total scattering cross sections for e-formaldehyde for which there are currently no theoretical or experimental results reported. The ionization cross sections for these targets are also estimated using the Deustch and Maerk formalism and are compared with Binary Encounter Bethe (BEB) data of Kim
