A comparison of methods for the determination of optical constants of thin films

Abstract

Three methods for the determination of the optical constants and thickness of thin films using spectrophotometric measurements have been compared. The methods were applied to simulated and experimental amorphous germanium films with several thicknesses. The determination of film thickness is better than by using a mechanical profilometer. The characteristics and range of application of each method are discussed with both simulated and experimental spectra. © 1992.This work has been partially supported by >Dlrec- ci6n General de Investigaci6n Cientifica y T6cnica> (CICYT) under the project M A T 88-0437.Peer Reviewe