thesis

Correlation of silicon microroughness on electrical parameters of SOI-AS (silicon-on-insulator with active substrate)

Authors
Publication date
1 January 1998
Publisher
Massachusetts Institute of Technology

Abstract

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998.Includes bibliographical references (leaves 83-86).by Hasan M. Nayfeh.M.S

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