Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2005.Includes bibliographical references (p. 39 ).The effect of probe tilt angle on the quality of Scanning Tunneling Microscopy (STM) measurements was explored. A small but consistent improvement in slope accuracy was documented lending some support to the effort to develop a new, five-axis STM capable of tilting in a controlled manner while scanning. The objective of such a machine would be to allow its probe to trace the sample's contour with greater accuracy than the currently available three-axis STM can. It is postulated that an STM with a probe that can change its roll and pitch in addition to its position along the traditional x, y, and z axes would be capable of reducing imaging errors produced as a result of geometric constraints, lateral electron discharge effects, and the tendency for the tip to bend during scanning due to electrostatic surface forces. In order to quantify the effects of incorporating probe tilt into the scanning process, a traditional, three-axis STM was manipulated in a way that allowed a standard sample grid to be imaged using a probe that was placed at seven different angles of tilt ranging from -13 to +13 degrees. Twenty-five different cavities in a standard STM scanning sample were scanned at these seven angles to determine notable trends and effects in the images produced.(cont.) It was determined that for each degree of angle change in the tilt of the probe, the slopes of the cavity walls imaged improved by an amount of slope equal to approximately 0.001 nm/nm, which corresponds to 0.0093% less imaging error. This seemingly trivial improvement in wall slope is significant in light of the fact that the change in slope per degree of probe tilt is on the same order of magnitude as the slopes of the cavity walls measured by the STM.by Jonathan B. Hopkins.S.B
