Characterization of chemical vapor deposited polycrystalline silicon thin films

Authors
Publication date
1 January 1986
Publisher
Massachusetts Institute of Technology

Abstract

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1986.MICROFICHE COPY AVAILABLE IN ARCHIVES AND ENGINEERINGBibliography: leaves 134-139.by Jean-Jacques Joseph Hajjar.M.S

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