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Comparative material study on RF and DC magnetron sputterd ZnO:Al films
Authors
O. Kluth
R. Menner
+5 more
M. Oertel
K. Orgassa
B. Rech
H. W. Schock
G. Schöpe
Publication date
1 January 2004
Publisher
Abstract
Abstract is not available.
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oai:juser.fz-juelich.de:43276
Last time updated on 16/05/2016