Quantitative TEM analysis of structural defects in helium implanted silicon

Authors
Publication date
1 January 2003
Publisher

Abstract

Abstract is not available.

    Similar works

    Full text

    thumbnail-image

    Available Versions

    Juelich Shared Electronic Resources

    redirect
    oaioai:juser.fz-juelich.de:38038
    Last time updated on 16/05/2016

    Juelich Shared Electronic Resources

    redirect
    oaioai:juser.fz-juelich.de:38058
    Last time updated on 16/05/2016