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La technologie MEMS au service de l’extraction des propriétés mécaniques des matériaux aux échelles micro et nano
Authors
ISTM Seminar - Maîtrise et caractérisation locale de microstructures dans les lignes d’interconnexions cuivre
Thomas Pardoen
Jean-Pierre Raskin
Publication date
1 January 2006
Publisher
Abstract
Abstract is not available.
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DIAL UCLouvain
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oai:dial.uclouvain.be:boreal:1...
Last time updated on 14/05/2016
DIAL UCLouvain
See this paper in CORE
Go to the repository landing page
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oai:dial.uclouvain.be:boreal:7...
Last time updated on 14/05/2016
