A robust thin-film wire-grid terahertz (THz) polarizer was fabricated via a low-cost, mass-producible manufacturing approach. This polarizer is built on a very thin silica layer structurally supported by a silicon substrate. In addition, the metal grating is protected by a polymer thin film, which eliminates the multireflection effect and enhances the robustness of the polarizer for easy packaging. The polarizer can be easily mounted onto a Newport rotation holder for immediate use. A THz time-domain spectrometer is used to characterize its performance, and an excellent agreement is found between the FDTD-simulated results and the experimental results. The polarizer offered 20-40 dB and 0.8 dB of extinction ratio and transmission loss over a frequency range of 0.2-2.0 THz, respectively
