Aluminum Oxide Growth Rate as a Function of Partial Pressure of Oxygen

Abstract

Aluminum oxide growth rate is needed to properly design an aluminum mirror for reflection of far ultraviolet radiation. An apparatus has been designed for evaporation of aluminum mirrors within a vacuum chamber where their reflectance can be tested without exposure to the atmosphere. The mirrors will then be exposed to different partial pressures of oxygen. Aluminum oxide growth rate over time will be determined as a function of oxygen partial pressure

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