This dissertation work builds upon the theoretical and experimental studies of radio frequency micro- and nano-electromechanical systems (RF M/NEMS) integrated multifunctional reconfigurable antennas (MRAs). This work focuses on three MRAs with an emphasis on a wireless local area network (WLAN), 5-6 GHz, beam tilt, and polarization reconfigurable parasitic layer-based MRA with inset micro-strip feed. The other two antennas are an X band (8-12 GHz) beam steering MRA with aperture-coupled micro-strip fed and wireless personal area network (WPAN), 60 GHz, inset micro-strip fed MRA for dual frequency and dual polarization operations. For the WLAN (5-6 GHz) MRA, a detailed description of the design methodology, which is based on the joint utilization of electromagnetic (EM) full-wave analysis and multi-objective genetic algorithm, and fundamental theoretical background of parasitic layer-based antennas are given. Various prototypes of this MRA have been fabricated and measured. The measured and simulated results for both impedance and radiation characteristics are given. The work on the MRAs operating in the X band and 60 GHz region focuses on the theoretical aspects of the designs. Different than the WLAN MRA, which uses inset fed structure, the aperture-coupled feed mechanism has been investigated with the goal of improving the bandwidth and beam-tilt capabilities of these MRAs. The simulated results are provided and the working mechanisms are described. The results show that the aperture-coupled feed mechanism is advantageous both in terms of enhanced bandwidth and beam-steering capabilities. Finally, this dissertation work concludes with plans for future work, which will build upon the findings and the results presented herein
