European Society for Precision Engineering and Nanotechnology
Abstract
A novel concept for improving machine dynamic performance was developed and realised, a virtual metrology frame, for a small
size CNC machine with flexible frame. Its implementation in a simplified linear motion system shows a reduction in the magnitude
of the first resonance in the plant frequency response function by 12 dB. Realising the concept required developing a real -time
accelerometer-based measurement technique. It shows a low sensor noise σ=30 nm with optimal phase delay of <70 μs