Aberration-corrected HREM/STEM for semiconductor research

Abstract

Aberration correction leads to a substantial improvement in the resolution of transmission electron microscopes. The JEM-2200FS in Oxford (Begbroke site) is equipped with correctors for both TEM and STEM. Alignment of the TEM and STEM correctors is achieved through variations of the Zemlin tableaux. The microscope can be used to study the same or similar regions of a sample in both TEM and STEM modes