Temperature sensors fabricated from ultra-low radioactivity materials have
been developed for low-background experiments searching for neutrinoless
double-beta decay and the interactions of WIMP dark matter. The sensors consist
of electrical traces photolithographically-patterned onto substrates of
vapor-deposited parylene. They are demonstrated to function as expected, to do
so reliably and robustly, and to be highly radio-pure. This work is a
proof-of-concept study of a technology that can be applied to broad class of
electronic circuits used in low-background experiments
