The kinetic origin of resonance phenomena in capacitively coupled radio
frequency plasmas is discovered based on particle-based numerical simulations.
The analysis of the spatio-temporal distributions of plasma parameters such as
the densities of hot and cold electrons, as well as the conduction and
displacement currents reveals the mechanism of the formation of multiple
electron beams during sheath expansion. The interplay between highly energetic
beam electrons and low energetic bulk electrons is identified as the physical
origin of the excitation of harmonics in the current