Digital micromirror devices for laser-based manufacturing

Abstract

Digital Micromirror Devices (DMDs), containing arrays of around one million individually-controllable ~10µm square mirrors, provide an extremely cost-effective and practical method to modulate the spatial beam profile of a pulsed laser source for both additive and subtractive laser processing and printing. When demagnified by a factor of ~100 in one dimension (hence ~10,000 in area) a ~1mJ/cm2 laser pulse reflected from the mirrors on the DMD surface that are switched to the 'on' position, attains a fluence of ~10J/cm2 at the workpiece, which is more than sufficient to ablate most materials of interest to the laser-manufacturing community. More familiar in the context of high values of magnification by the laser projection industry, reversing the role to use them for equally high values of demagnification opens up a wealth of possibilities for ablation, multiphoton polymerization, security marking and fabrication of features that perhaps surprisingly can be well below the wavelength of the laser used. Of key relevance is that very high-resolution patterning can be achieved by a single laser pulse, and step-and-repeat processes, when combined with the refresh rates of the DMD pattern that are currently at the 30kHz level, open up the possibility of processing areas of up to 1cm2 per second with micron-scale resolution where each ~100µm x 100µm area patterned per pulse can display arbitrary pixelated content. We will discuss the application of DMD-baser laser processing to the following areas of interest to the laser-manufacturing community