The composition, crystallinity, uniformity, purity, and thermal stability of cuprate superconductors have been studied by Rutherford backscattering and channeling spectrometry, and 3.045 MeV He+ oxygen non-Rutherford resonant scattering. Further experiments have been performed with 1.75 MeV H+carbon non-Rutherford resonant scattering. Three sets of samples were studied : HgBa2CuO(4+δ) (Hg1201), HgxT11−xBa2Ca2Cu3O(2n+δ) (Hg,T1-1223) and T11.85Ba2CuO6/LaA103 (T1-2201), either in bulk or as an epitaxial thin film. It was observed that the superconductors exhibit a metal deficiency near the surface, which is largely compensated by excess oxygen. Moreover, the samples are significantly contaminated with carbon within the probing region of the H+ beam. The thermal stability and surface degradation were studied in both oxidizing ambient and vacuum. As a general trend, the heavy metal deficiency — and consequently the compensating oxygen excess — is enhanced as the temperature increases