We report on the development of evaporative fluorocarbon cooling recirculators and their control systems for the ATLAS inner silicon tracker. We have developed a prototype circulator using a dry, hermetic compressor with C/sub 3/F/sup 8/ refrigerant, and have prototyped the remote-control analog pneumatic links for the regulation of coolant mass flows and operating temperatures that will be necessary in the magnetic field and radiation environment around ATLAS. pressure and flow measurement and control use 150+ channels of standard ATLAS LMB ("Local Monitor Board") DAQ and DACs on a multi-drop CAN network administered through a BridgeVIEW user interface. A hardwired thermal interlock system has been developed to cut power to individual silicon modules should their temperatures exceed safe values. Highly satisfactory performance of the circulator under steady state, partial-load and transient conditions was seen, with proportional fluid flow tuned to varying circuit power. Future developments, including a 6 kW demonstrator with ~25 cooling circuits, are outlined
