Study of a friction modulation haptic interface based on thin-film AlN Actuators

Abstract

International audienceThis paper presents the study of a low-voltage haptic interface developpedat CEA LETI based on friction reduction through ultrasonic actuation. Thesystem is driven by 2 μm thick AlN piezoelectric actuators deposited on glassand exploits the resonance of a Lamb mode at f = 67.2kHz. A laser Dopplervibrometer characterisation, a tribological study and a psychophysical campaignhave shown that the system is efficient for voltages below 50 Vpp