Baumbach, T

Holy, V

Pietsch, U

Holy, V.

Pietsch, U.

Baumbach, T.

Fraunhofer-ePrints

High-resolution X-ray scattering from thin films and multilayers

CERN Document Server

Väclav He Ullrich PietschTilo BaumbachHigh-ResolutionX-Ray Scatteringfrom Thin Filmsand MultilagersWith 148 FiguresSpringerContentsPart L Experimental Realization1. Basic Elements of the Equipment 	 31.1 X-Ray Sources 	  31.2 Monochromators and Collimators 	  61.3 Detectors	 122. Diffractometers and Reflectometers 	  172.1 X-Ray Reflectometers 	  182.2 High-Resolution Diffractometer 	  212.3 Limits an the Use of Powder Diffractometers 	  232.4 Grazing-Incidence Diffraction 	  243. Scans and Resolutionin Angular and Reciprocal Space 	  273.1 Coherence of Radiation at the Sample Position 	  283.2 Scans Across Reciprocal Space 	  303.3 Resolution Elements in Reciprocal Space 	  33References: Part I 	 39Part II. Theory4. Basic Principles 	  434.1 Description of the X-Ray Wavefield 	  434.2 Translational Symmetry of the Sample 	  484.3 Direction of the Scattered Waves 	  504.4 Randomly Disturbed Samples 	  554.5 Classification of Scattering Theories 	  565. Kinematical Scattering Theory 	  595.1 Scattering from a Single Atom 	  595.2 Perfect Layers	 625.3 Refraction and Absorption Corrections 	  67X	 Contents5.4 Deformed Samples 	  695.5 Multilayers 	  725.6 Randomly Deformed Samples 	  766. Dynamical Scattering Theory 	  816.1 The Wave Equation 	  816.2 Boundary Conditions 	  836.3 X-Ray Reflection 	  866.4 Two-Beam Diffraction 	  896.5 Layered Samples 	  946.5.1 Multilayers: X-Ray Reflection 	  976.5.2 Multilayers: Conventional X-Ray Diffraction 	  996.6 The Takagi–Taupin Equation 	  1006.7 The Kinematical Limit of the Takagi–Taupin Equation 	  1026.8 The Takagi–Taupin Equation in the One-Beam Case 	  1056.9 Distorted-Wave Born Approximation (DWBA) 	  106References: Part II 	  113Part III. Solution of Selected Experimental Problems7. Layer Thicknesses of Single Layersand Multilayers 	 1197.1 X-Ray Reflection by Single Layers 	 1207.2 X-Ray Reflection by Periodic Multilayers 	 1287.3 Coplanar X-Ray Diffraction by Single Layers 	 1347.4 Coplanar X-Ray Diffraction by Periodic Superlattices 	  1377.5 X-Ray Grazing-Incidence Diffraction 	 1437.6 Buried Layers 	 1457.6.1 High-Resolution X-Ray Diffraction 	 1457.6.2 X-Ray Reflection	  1487.6.3 Grazing-Incidence Diffraction 	  1498. Lattice Parameters and Lattice Strainsin Single Epitaxial Layers	 1518.1 Conventional Coplanar Diffraction	 1518.2 Coplanar Extremely Asymmetrie Diffraction 	  1608.3 Grazing-Incidence Diffraction 	  1649. Volume Defects in Layers	  1699.1 Diffuse Scattering from Weak Defects 	 1709.2 Diffuse X-Ray Reflectionfrom Layers Containing Small-Volume Defects	  1809.3 Diffraction from Relaxed Epitaxial Layers 	  18210. X-Ray Reflection by Rough Multilayers 	10.1 Introduction 	10.2 Interface Roughness: The Scattering Potentialand its Statistical Properties 	10.2.1 The Scattering Potential of a Multilayerwith Rough Interfaces	10.3 Specular X-Ray Reflection	10.3.1 Theoretical Description 	10.3.2 Examples 	10.4 Non-Specular X-Ray Reflection	10.4.1 Theoretical Description 	10.4.2 Examples 	11. X-Ray Scattering by Gratings and Dots 	11.1 Scattering by Surface Gratings:General Considerations 	11.1.1 Scattering Potential 	11.1.2 Diffraction by a Surface Grating 	11.2 Coplanar X-Ray Diffraction 	11.2.1 Determination of the Grating Periodand the Etching Depth 	11.2.2 Reciprocal-Space Mapping 	11.2.3 Diffraction by Superlattice Surface Gratings 	11.3 Grazing-Incidence Diffraction 	11.3.1 Investigation of the Shape and Strain 	11.4 Diffraction by Buried Gratings 	11.5 Lateral Strain-Induced Patterning 	11.6 Quantum Dots	References: Part III 	A. Wave Vectors and Amplitudesof the Internal Wavefieldsin a Dynamically Scattering Crystal 	A.1 Coplanar Diffraction 	A.2 Grazing-Incidence Diffraction 	A.3 X-Ray Reflection 	Index	Contents•XI191191192192195195198207208211221221221224225225226231232232236238240243247247250251253

High-resolution x-ray scattering from thin films and multilayers

High-resolution x-ray scattering from thin films and multilayers

Abstract

Similar works

Full text

Available Versions

Fraunhofer-ePrints

CERN Document Server