Garg, Atul

etd@IISc Electronic Theses and Dissertations at Indian Institute of Science

Preface Acoustic sensors are an important link in sound reproductlon and communication systems. Acoustic sensors are the sensors, which convert acoustlc signals in to equivalent electric slgnals. Acoustic sensors find wlde applications in areas such as consumer products (telephone arcuits, speech amplifiers, tape recorder and hearing aids etc), space, medical and industrial applications The human ear is a natural acoustic transducer wth tolerance to wide amplitude variations However, either it falls or becomes apparently imposs~ble to use in hazardous & radiation environments and remote areas Therefore, there is an increasing interest to develop acoustic sensors, which can be used to sense high intensity sounds and are suitable in adverse environmental condition Many transduction principles such as, carbon based, piezoresistive, piezo-crystal, capacitive and piezoelectric film etc. have been explored for the realization of acoustlc sensors. Present thesis is concerned with the development of acoustic sensor uslng piezoelectric thin film prepared by DC reactive magnetron sputtering technique The necessary background information on acoustic sensor IS given bnefly in chapter 1 It n followed by the description of acoustic sensors based on various methods & transductlon principles Also, Ideal charactenstics of an acoustic sensor are Included Focus of the present thesis is presented at the end of this chapter. Chapter 2 presents the brief description of different deposition techniques and film thickness measurement techniques. Information on the different characterization techniques (X ray diffraction technlque, Spectrophotometry and cantilever technlque) for confirming the piezoelectric behavior of the deposited film is also provided in this chapter. Chapter 3 presents a detailed account of the work c d  out on the design, development and analysis of thin film based acoustic sensor It includes the details regarding optimization o f  process parameters for preparing the piezoelectric thln film using DC reactlve magnetron sputtering technique. Study on the confirmation of the deposited film for its piezoelectric behavior using dtrect method as well as mdirect methods are presented m this chapter Analyses of different diaphragm parameters are also included in this chapter. Performance study carried out and results obtained on the developed acoust~c sensors (with different diaphragm dlmenslons and electrode configurations) are presented i Chapter 4 The final chapter namely Chapter 5, presents the summary of the work carrle out, conclusions arr~ved at and the scope for carrylng out further work in the dlrect~on c malung acoustic sensor with Improved character~stlcs. 

Development Of Piezoelectric Thin Film Based Acoustic Sensor

http://etd.iisc.ac.in/static/etd/abstracts/1568/G18589-Abs.pdf

Development Of Piezoelectric Thin Film Based Acoustic Sensor

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etd@IISc Electronic Theses and Dissertations at Indian Institute of Science