Micropumps - A literature study

Abstract

A large number of actuation techniques for driving fluid through microchannels are reviewed systematically in this report. The main emphasis is given on actuation principle, structure and characteristics of the pump. Every technique has certain merits and demerits associated with it. In case of mechanical type micropumps, the moving parts make fabrication processes complex. In non-mechanical types, the fluid transport techniques relying on interfacial phenomena depend upon surface properties of the channel, the bulk force operated techniques depend on fluid properties. The former are difficult to be kept constant and reproducible and the latter limit the range of fluids which can be pumped. The ideal technique should involve no moving parts and at the same time be largely independent of fluid and surface properties