Information limit of 15 pm achieved with bright-field ptychography

Abstract

It is generally assumed that a high spatial resolution of a microscope requires a large numerical aperture of the imaging lens or detector. In this study, the information limit of 15 pm is achieved in transmission electron microscopy using only the bright-field disk (small numerical aperture) via multislice ptychography. The results indicate that high-frequency information has been encoded in the electrons scattered to low angles due to the multiple scattering of electrons in the objects, making it possible to break the diffraction limit of imaging via bright-field ptychography.Comment: 10 pages, 4 figure