The growth, morphology, and structure of MnxAu1-x films on Cu(001) and Ag(001) are studied by means of low-energy electron diffraction (LEED), medium-energy electron diffraction, Auger electron spectroscopy, and scanning tunnelling microscopy. Different concentrations x from about 0.5 to 1 and thicknesses from0.2 to 12.9 ML of MnxAu1-x are examined. For several values of x, MnxAu1-x exhibits a c(2 x 2) superstructure pattern on Cu(001) when the total thickness is around or above 0.5 ML. Above 1 ML, LEED patterns of MnxAu1-x can be only observed on Ag(001), but not on Cu(001). LEED-I(V) is employed to deduce the vertical interlayer distance for as-grown and post-annealed films on Ag(001). Above 500 K, Ag from the substrate segregates into thefilms