In many manufacturing processes, production steps are carried out on repetitive structures which consist of identical features placed in a repetitive pattern. In the production of these repetitive structures one or more consecutive steps are carried out on the features to create the final product. Key to obtaining a high product quality is to position the tool with respect to each feature of the repetitive structure with a high accuracy. In current industrial practice, local position sensors such as motor encoders are used to separately measure the metric position of the tool and the stage where the repetitive structure is on. Here, the final accuracy of alignment directly relies on assumptions like thermal stability, infinite machine frame stiffness and constant pitch between successive features. As the size of these repetitive structures is growing, often these assumptions are difficult to satisfy in practice. The main goal of this thesis is to design control approaches for accurately positioning the tool with respect to the features, without the need of the aforementioned assumptions. In this thesis, visual servoing, i.e., using machine vision data in the servo loop to control the motion of a system, is used for controlling the relative position between the tool and the features. By using vision as a measurement device the relevant dynamics and disturbances are therefore measurable and can be accounted for in a non-collocated control setting. In many cases, the pitch between features is subject to small imperfections, e.g., due to the finite accuracy of preceding process steps or thermal expansion. Therefore, the distance between two features is unknown a priori, such that setpoints can not be constructed a priori. In this thesis, a novel feature-based position measurement is proposed, with the advantage that the feature-based target position of every feature is known a priori. Motion setpoints can be defined from feature to feature without knowing the exact absolute metric position of the features beforehand. Next to feature-to-feature movements, process steps involving movements with respect to the features, e.g., engraving or cutting, are implemented to increase the versatility of the movements. Final positioning accuracies of 10 µm are attained. For feature-to-feature movements with varying distances between the features a novel feedforward control strategy is developed based on iterative learning control (ILC) techniques. In this case, metric setpoints from feature to feature are constructed by scaling a nominal setpoint to handle the pitch imperfections. These scale varying setpoints will be applied during the learning process, while second order ILC is used to relax the classical ILC boundary of setpoints being the same every trial. The final position accuracy is within 5 µm, while scale varying setpoints are applied. The proposed control design approaches are validated in practice on an industrial application, where the task is to position a tool with respect to discrete semiconductors of a wafer. A visual servoing setup capable of attaining a 1 kHz frame rate is realized. It consists of an xy-stage on which a wafer is clamped which contains the discrete semiconductor products. A camera looks down onto the wafer and is used for position feedback. The time delay of the system is 2.5 ms and the variation of the position measurement is 0.3 µm (3s)
