Interdisciplinary Graduate School of Engineering Sciences, Kyushu University
Abstract
An attempt to produce a pure ECR plasma is performed with an aluminium Lisitano coil. Plasma parameters obtained agree well with those of the plasma produced with a copper Lisitano coil. Sputtered-impurity atoms which are ejected from the surface of the aluminium Lisitano coil are found to be very few, compared with the copper Lisitano coil
