The unique properties of x rays offer many advantages over those of electrons and other charged particles for the microcharacterization of materials. X rays are more efficient in exciting characteristic x-ray fluorescence and produce higher fluorescent signal-to-background ratios than obtained with electrons. Such x-ray microprobes will also produce unprecedentedly low levels of detection in diffraction, EXAFS, Auger, and photoelectron spectroscopies for structural and chemical characterization and elemental identification. These major improvements in microcharacterization capabilities will have wide-ranging ramifications not only in materials science but also in physics, chemistry, geochemistry, biology, and medicine. 24 refs., 6 figs., 2 tabs
