We have developed a process for fabricating monodisperse noble metal/rare earth disilicide core-shell nanoparticles and nanowires in regular arrays on Si(001) with a density of 5 x 10(10) / cm2, and over areas > 1 mm2. Pt deposited via physical vapor deposition on a self-assembled rare earth disilicide nanowire template combined with reactive ion etching produces arrays of nanostructures. SEM images demonstrate the ability to select nanowires or nanoparticles as a function of Pt coverage. Statistical analysis of images of Pt nanoparticle arrays yield a mean feature size of 8 nm with a size variation of +/- 0.9 nm and interparticle spacing of approximately 15 nm
