Dataset supporting the publication "Mechanical dicing of optical quality facets and waveguides in a Silicon Nitride platform".

Abstract

Dataset supporting the publication &quot;Mechanical dicing of optical quality facets and waveguides in a Silicon Nitride platform&quot;. This dataset supports the publication: AUTHORS: Paul C Gow, Glenn M Churchill, Valerio Vitali, Thalia Dominguez Bucio, Frederic Y Gardes, Matthew P. D&rsquo;Souza, Periklis Petropoulos, Corin B E Gawith and James C Gates TITLE: Mechanical dicing of optical quality facets and waveguides in a Silicon Nitride platform. JOURNAL: Electronics Letters PAPER DOI IF KNOWN: 10.1049/ell2.13138 This zipped dataset contains: &quot;NCM_3_FAST_Topography_Forward 5.0x5.0&quot; TIFF file of the topography of one of the machined Silicon Nitride facets measured using a Park Systems Atomis Force Microscope. &quot;SirichSiN_300nmThickness_TOPWaveguide_TotalTransmissionLosses_meas1&quot; Microsoft Excel file containing two tabs. &quot;Overview&quot; shows general information of the spectrum analyser used. &quot;IL&quot; shows wavelength data in column A, and Loss data in Column B.</span