Low-temperature open-atmosphere growth of WO<sub>3</sub> thin films with tunable and high-performance photoresponse

Abstract

Acknowledgements: Zhuotong Sun, Ming Xiao, and Judith L. MacManus-Driscoll thank the Royal Academy of Engineering grant, CIET1819_24, for funding. Subhajit Bhattacharjee thanks the Cambridge Trust (HRH The Prince of Wales Commonwealth Scholarship) for funding. Judith L. MacManus-Driscoll and Rob Jagt also thank Bill Welland for funding, as well as EPSRC grant EP/N509620/1 for funding a PhD studentship. Megan Hill thanks the Herchel Smith Foundation for a research fellowship. Kevin Musselman and Louis-Vincent Delumeau thank the Canada Foundation for Innovation Exceptional Opportunities Fund, Project 41017, for funding. The authors also thank Babak Bhakit for facilitating the ToF-ERDA analysis of the film, Yang Li on Raman characterization, and Qingshen Jing and Nives Strkalj for fruitful discussion on the figures. In-situ orientation tuning of WO3 thin films with high crystallinity is achieved with a low-temperature and open-atmosphere deposition technique. The fabricated devices showed a significant change in photo-response for film orientation.</jats:p

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